Flow Sensor FUS20 series

Fluid medium	Clean air（JIS B 8392-1.1.1~5.6.2) Compressed air （JIS B 8392-1.1.1~1.6.2) and nitrogen gas
Min. working pressure	-0.09 MPa
Withstand pressure	1 MPa
Ambient temp. and humidity	0~50ºC, max. 90%RH
Working fluid temp.	0~50ºC (No dew condensation)

Fluid medium

Clean air（JIS B 8392-1.1.1~5.6.2)
Compressed air （JIS B 8392-1.1.1~1.6.2)
and nitrogen gas

Min. working pressure

-0.09 MPa

Withstand pressure

1 MPa

Ambient temp. and humidity

0~50ºC, max. 90%RH

Working fluid temp.

0~50ºC (No dew condensation)

Description

MM size (mm)	ø4, ø6, ø8, ø10

Flow management and suction lift verification of small work piece are possible.

Built-in needle valve modelFlow adjustable needle valve and sensor are integrated into one unit. Fuss-free plumbing and minimized installation space are realized.

Panel mount is possible.Bracket for panel mount is available. Sensor as well as built-in needle valve sensor can be panel mounted. Since coherent installation is possible, one large panel cut make possible for mounting multiple sensors with minimum space and process.

Dual display / 2 color indication featureIntroduction of main and sub display improve operability. Additionally, 2 colors indication makes easy cognition of error.

Free installation orientationThe sensor can be mounted in any orientation : top, bottom, left, or right.

- Bi-directional flow measurement is possible.Bidirectional flow model can measure the flow of preset direction. Flexibility of the plumbing installation improves and usable for reverse flow detection.

No straight piping is requiredThe newly proposed rectifying structure eliminates the need for a straight piping section upstream or downstream.

Quick response time：Max. 50msec.High-speed response is realized by incorporating a platinum sensor chip processed with silicon micromachining. It contributes to shorten takt time.