External Vacuum Controller VIP

Fluid medium	Air (JIS B 8392-1：Class1.2.1~2.4.3 compliant), Vacuum
Operating pressure range	0.3~0.7MPa
Working vacuum range	-90~0kPa
Operating temp. range	5~50ºC (No freezing)
Operating humidity rang	35~85%RH (No freezing)
Vibration /Impact resistance	Max. 50m/s² / Max. 150m/s²
Protective structure	Equivalent to IEC IP40
Lubrication	Not required
Proof pressure (Air supply circuit)	1.05MPa
Proof pressure (Vacuum circuit)	0.2Mpa

Fluid medium

Air (JIS B 8392-1：Class1.2.1~2.4.3 compliant), Vacuum

Operating pressure range

0.3~0.7MPa

Working vacuum range

-90~0kPa

Operating temp. range

5~50ºC (No freezing)

Operating humidity rang

35~85%RH (No freezing)

Vibration /Impact resistance

Max. 50m/s² / Max. 150m/s²

Protective structure

Equivalent to IEC IP40

Lubrication

Not required

Proof pressure (Air supply circuit)

1.05MPa

Proof pressure (Vacuum circuit)

0.2Mpa

Description

■ Vacuum port tube diameter

MM size (mm)	ø1.8, ø3, ø4

■ Air supply port Tube diameter

MM size (mm)	ø4, ø6, ø8

■ Vacuum supply port Tube diameter

MM size (mm)	ø4, ø6, ø8

Feature

Built-in flow sensor type (Industry’s first) is added to the lineup. Conventional pressure sensor mount type and no pressure sensor type are also prepared.
Recommendable to semiconductor related equipment (chip mounter and handler) and vacuum transfer equipment for miniature work piece.

- Ultra small yet large vacuum flow control is possible.8.5L/min[ANR] at vacuum supply -80kPa

Vacuum break airflow control method is selectable.Not only a built-in vacuum break airflow control needle valve model but also cost effective built-in fixed vacuum break airflow model is also available. (At 0.5MPa air supply, over 9.5L/min[ANR])

External Vacuum Controller VIP

Specification

* Proof pressure does not indicate the pressure by which products operate normally but the pressure products does not break down.